ISP Thiết bị SEM IM-60 Series

    ISP Thiết bị SEM IM-60 Series

    IM-60 is an advanced model that satisfies a variety of analysis purposes.
    The SE (secondary electrons) detector and BSE (backscattered electrons)
    detector can be mounted selectively.The basic stage is composed of three
    (manual) axes: X, Y, R. You can change the configuration to a five-axis
    automatic stage with additional Z and Tilt axes as necessary.
    You can also change the configuration to either the tabletop type or
    tower (carrier) type, according to the purpose and install environment.

    Mã: 1171-20080 Danh mục: Từ khóa: , , , ,

    Specification

    IM-60 SERIES
    MODELTYPE IM-60-SM IM-60-DM IM-60-SA IM-60-DA
    Ⅰ. Major Features
    1Detector SE SE+BSE SE SE+BSE
    2Stage System (Storke) X,Y(40㎜), R(360˚)
    3-axis Manual    		 X,Y(40㎜), R(360˚)
    3-axis Manual    		 X,Y(40㎜), R(360˚),
    Z (0~40㎜), Tilt(0~60˚)
    5-axis Motorized    		 X,Y(40㎜), R(360˚),
    Z (0~40㎜), Tilt(0~60˚)
    5-axis Motorized
    3Resolution 10nm
    4Accelerating Voltage 5~30kV
    5Magnifications 20x~60,000x
    6Maximum Sample Size 80㎜(D) x 40㎜(H)
    Ⅱ. Electron Optics
    1Electron Gun Tungsten(W) Filament
    2Aperture(O.L) Single Type
    3Beam Shift X.Y 100㎛ (±50)
    Ⅲ. Image System
    1Image Diplay 22inch LCD
    2Image Fomat BMP,JPEG,PNG,TIFF
    3OS Windows10
    4Scan Mode 320×240,640×480,1280×960,2560×1280,5120×3840
    5Automation Function Auto Focus, Contrast&Brightness, Stigmator, Gun Align(by gou align coil)
    Ⅴ. Vacuum
    1Vacuum mode High Vacuum
    2Pump System Initial Vacuum : Rotary(100L),
    High Vacuum : Turbo Molecular(80L) / Full Automation
    Ⅵ. Dimensions
    1SEM 480(W)x480(D)x1180㎜, 90kg
    2Rotary Pump 400(W)x160(D)x340(H)㎜, 24kg
    Ⅶ. Additional
    1SEM CCD CAMERA(Navigation mode), Analysis Joystick Controller
    2Option Low Vacumm, EDS, Cooling Stage, STEM Dectector