Specification
MODEL | IM-10 SERIES |
---|---|
Ⅰ. Major Features | |
1Detector | BSE |
2Stage System (Storke) | X,Y(40㎜) 2-axis Motorized |
3Resolution | 40nm |
4Accelerating Voltage | 10~30kV |
5Magnifications | 50x~30,000x |
6Maximum Sample Size | 50㎜(D) x 40㎜(H) |
Ⅱ. Electron Optics | |
1Electron Gun | Tungsten(W) Filament |
2Aperture(O.L) | Single Type |
3Beam Shift | X.Y 100㎛ (±50) |
Ⅲ. Image System | |
1Image Diplay | 22inch LCD |
2Image Fomat | BMP,JPEG,PNG,TIFF |
3OS | Windows10 |
4Scan Mode | 320×240,640×480,1280×960,2560×1280 |
5Automation Function | Auto Focus, Contrast&Brightness, Stigmator, Gun Align(by gou align coil) |
Ⅴ. Vacuum | |
1Vacuum mode | Low Vacuum |
2Pump System | Initial Vacuum : Rotary(100L), High Vacuum : Turbo Molecular(80L) / Full Automation |
Ⅵ. Dimensions | |
1SEM | 480(W)x480(D)x1180㎜, 90kg |
2Rotary Pump | 400(W)x160(D)x340(H)㎜, 24kg |
Ⅶ. Additional | |
1SEM | CCD CAMERA, Analysis Joystick Controller |
2Option | EDS, Cooling Stage |